In principle, industrial vacuum pumps are merely compressors run with the inlet attached to the vacuum system and the outlet open to exhaust. In smaller sizes, compressors and vacuum pumps are often ...

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Three DARPA-funded research teams have completed a foundational study of chip-scale vacuum pumps by inventing three very different approaches to removing air from a sample chamber with a volume of one ...

High vacuum lines and valves should be designed in accordance with the nominal pumping speed of the high vacuum pump. Otherwise, there will be considerable losses in the effective pumping speed due to ...